I liked the carpet cleaning that I got recently from
It's a one-man shop using a truck-mounted hi-temp rig. He uses a high-tech power head ("rotary jet extractor") that leaves most carpets dry in 2 hours, or he will use a traditional steam head if you ask.
His price is a flat 35 cents per square foot plus $3.85 per stair, and he only charges for "cleanable" square feet. No extra cost for vacuuming or spot pre-treatment.